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Transmission Electron Microscope Specimen Preparation of Si-Based Anode Materials for Li-Ion Battery by Using Focused Ion Beam and Ultramicrotome
Applied Microscopy 2018;48:49-53
Published online June 30, 2018
© 2018 Korean Society of Microscopy.

Jeong Eun Chae, Jun Mo Yang1, Sung Soo Kim2, Ju Cheol Park*

Testing & Certificatin Division Materials Characterization Center, Gumi Electronics & Information Technology Research Institute, Gumi 39171, Korea, 1Department of Nanostructure Technology, National Nanofab Center, Daejeon 34141, Korea, 2Graduate School of Energy Science and Technology, Chungnam National University, Daejeon 34134, Korea
Correspondence to: Park JC,, Tel: +82-54-479-2181, Fax: +82-54-479-2080, E-mail:
Received April 11, 2018; Revised April 27, 2018; Accepted April 28, 2018.
This is an open-access article distributed under the terms of the Creative Commons Attribution Non-Commercial License ( which permits unrestricted noncommercial use, distribution, and reproduction in any medium, provided the original work is properly cited.
A successful transmission electron microscope (TEM) analysis is closely related to the preparation of the TEM specimen and should be followed by the suitable TEM specimen preparation depending on the purpose of analysis and the subject materials. In the case of the Si-based anode material, lithium atoms of formed Li silicide were removed due to ion beam and electron beam during TEM specimen preparation and TEM observation. To overcome the problem, we proposed a new technique to make a TEM specimen without the ion beam damage. In this study, two types of test specimens from the Si-based anode material of Li-ion battery were prepared by respectively adopting the only focused ion beam (FIB) method and the new FIB-ultramicrotome method. TEM analyses of two samples were conducted to compare the Ga ion damage of the test specimen.
Keywords : Li ion battery, Si-based anode material, Focused ion beam, Ultramicorome, Transmission electron microscopy

June 2018, 48 (2)
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  • Ministry of Trade, Industry and Energy(Ministry of Trade, Industry and Energy, Korea)
  • Science Central
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